28 February 2005 Technology interfaces to microsystem and nanoelectronic processes
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Abstract
A process management and development system for MEMS design is introduced. It allows the specification of processes for specific applications and the tracking of the development procedures. The system is based on a dedicated database environment that is able to store and manage all process related design constraints and development related data linked to the fabrication process data itself. The interdependencies between application specific processes and all stages of the design flow will be discussed and a software system will be introduced meeting the requirements of this new approach. Although initially dedicated to microsystem processes this environment may also support nanoelectronic fabrication technologies.
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Thilo Schmidt, Andreas Wagener, Jens Popp, Kai Hahn, "Technology interfaces to microsystem and nanoelectronic processes", Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); doi: 10.1117/12.581830; https://doi.org/10.1117/12.581830
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KEYWORDS
Computer aided design

Data processing

Etching

Microelectromechanical systems

Databases

Interfaces

Nanoelectronics

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