Automatic Wafer Stepper Calibration And Testing

Chris K. Van Peski

doi:10.1117/12.949725

2 January 1986 Automatic Wafer Stepper Calibration And Testing

Chris K. Van Peski

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949725
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Wafer stepper calibration and testing may be facilitated by using the auto wafer aligner feature of the wafer stepper as a metrology tool. This paper describes the procedures utilized in the calibration and acceptance testing of wafer steppers. The method of collecting data is explained, as well as the algorithms used to calculate calibration factors. Data from actual system tests is presented.

Citation Download Citation

Chris K. Van Peski "Automatic Wafer Stepper Calibration And Testing", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949725

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