Piezoelectric Translators With Submicron Accuracy

Karl Spanner; Harry Marth; Warren Gutheil

doi:10.1117/12.949730

2 January 1986 Piezoelectric Translators With Submicron Accuracy

Karl Spanner, Harry Marth, Warren Gutheil

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949730
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

In manufacturing integrated circuits, the tendency is toward smaller and smaller structures. Therefore the requirements for accurate micropositioning in lithography and wafer handling are growing more stringent. In many cases even a positioning accuracy of 0.1 micron is not good enough. But traditional precision mechanical positioners come to their limits in this range. Play, backlash, elasticity, friction and temperature changes can only be partially eliminated. One possible way to overcome these problems is with positioners based on the inverse piezo effect.

Citation Download Citation

Karl Spanner, Harry Marth, and Warren Gutheil "Piezoelectric Translators With Submicron Accuracy", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949730

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