23 February 2005 Control of MEMS-based actuator array for micro smart systems
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In the present work, the authors were focused on control modes used in distributed microsystems. Especially, they studied distributed manipulation like motion active surface that have been an important topic in micro and nanofabrication field. After comparing advantages and drawbacks between centralized, decentralized and distributed control systems, they decided to apply the control mode to an airflow active surface based on pneumatic microactuator array, and fabricated by MEMS technology. The size of the device is about 35x35 mm2 for 560 MEMS-based actuators and holes respectively at the front- and the back-side of the silicon substrate. In a first approach, and to overcome fabrication problems of the micro-smart system, combining electronic and electro mechanic elements, a co-design software/hardware solution was implemented. By this way, and using a digital image captured from a CCD camera, autonomy of the distributed microsystems could be developed. Afterward, a feedback control strategy was elaborated by applying principles of autonomous mobile robots that lend it to. A first prototype, validating all control mode principles was successfully implemented directly in software. Experiment results demonstrated advantages and good performances of the method.
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Yves-Andre Chapuis, Yves-Andre Chapuis, Yamato Fukuta, Yamato Fukuta, Lingfei Zhou, Lingfei Zhou, Yoshio Mita, Yoshio Mita, Hiroyuki Fujita, Hiroyuki Fujita, } "Control of MEMS-based actuator array for micro smart systems", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582866; https://doi.org/10.1117/12.582866


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