Development of a MEMS-based micro combustor for a micro gas turbine engine

Xue Chuan Shan; Yu Feng Jin; Zhen Feng Wang; Chee Khuen Wong; Y. Murakoshi; Ryutaro Maeda

doi:10.1117/12.580783

23 February 2005 Development of a MEMS-based micro combustor for a micro gas turbine engine

Xue Chuan Shan, Yu Feng Jin, Zhen Feng Wang, Chee Khuen Wong, Y. Murakoshi, Ryutaro Maeda

Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.580783
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mmx21mmx4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.

Citation Download Citation

Xue Chuan Shan, Yu Feng Jin, Zhen Feng Wang, Chee Khuen Wong, Y. Murakoshi, and Ryutaro Maeda "Development of a MEMS-based micro combustor for a micro gas turbine engine", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.580783

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