23 February 2005 Development of a MEMS-based micro combustor for a micro gas turbine engine
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This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mmx21mmx4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.
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Xue Chuan Shan, Xue Chuan Shan, Yu Feng Jin, Yu Feng Jin, Zhen Feng Wang, Zhen Feng Wang, Chee Khuen Wong, Chee Khuen Wong, Y. Murakoshi, Y. Murakoshi, Ryutaro Maeda, Ryutaro Maeda, } "Development of a MEMS-based micro combustor for a micro gas turbine engine", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.580783; https://doi.org/10.1117/12.580783

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