Translator Disclaimer
Paper
23 February 2005 Investigation of layered SAW sensors based on a WO3/ZnO/64° YX LiNbO3 structure with gold catalytic layer
Author Affiliations +
Abstract
A layered Surface Acoustic Wave (SAW) hydrogen gas sensor, based on a delay line structure with 64 finger pairs on input and output port, is fabricated on 64° Y-cut, X-propagating LiNbO3 substrate. A guiding layer of ZnO is used to increase the sensitivity of the structure. A WO3 selective layer is employed to H2 gas sensing applications at different operating temperatures between room temperature and 300°C. In this paper, the fabrication process of WO3/ZnO/64° YX LiNbO3 sensor is described and the sensor’s response features are analyzed. The improvement of the response with the addition of a gold catalytic layer on the sensor surface is also investigated.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay Prasad Sivan, Samuel James Ippolito, Sasikaran Kandasamy, Kourosh Kalantar-Zadeh, Wojtek Wlodarski, and Anthony Stephen Holland "Investigation of layered SAW sensors based on a WO3/ZnO/64° YX LiNbO3 structure with gold catalytic layer", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582222
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
Back to Top