Investigation of layered SAW sensors based on a WO3/ZnO/64° YX LiNbO3 structure with gold catalytic layer

Vijay Prasad Sivan; Samuel James Ippolito; Sasikaran Kandasamy; Kourosh Kalantar-Zadeh; Wojtek Wlodarski; Anthony Stephen Holland

doi:10.1117/12.582222

23 February 2005 Investigation of layered SAW sensors based on a WO₃/ZnO/64° YX LiNbO₃ structure with gold catalytic layer

Vijay Prasad Sivan, Samuel James Ippolito, Sasikaran Kandasamy, Kourosh Kalantar-Zadeh, Wojtek Wlodarski, Anthony Stephen Holland

Author Affiliations +

Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.582222
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

A layered Surface Acoustic Wave (SAW) hydrogen gas sensor, based on a delay line structure with 64 finger pairs on input and output port, is fabricated on 64° Y-cut, X-propagating LiNbO₃ substrate. A guiding layer of ZnO is used to increase the sensitivity of the structure. A WO₃ selective layer is employed to H₂ gas sensing applications at different operating temperatures between room temperature and 300°C. In this paper, the fabrication process of WO₃/ZnO/64° YX LiNbO₃ sensor is described and the sensor’s response features are analyzed. The improvement of the response with the addition of a gold catalytic layer on the sensor surface is also investigated.

Citation Download Citation

Vijay Prasad Sivan, Samuel James Ippolito, Sasikaran Kandasamy, Kourosh Kalantar-Zadeh, Wojtek Wlodarski, and Anthony Stephen Holland "Investigation of layered SAW sensors based on a WO₃/ZnO/64° YX LiNbO₃ structure with gold catalytic layer", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582222

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available