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23 February 2005 Plasma-induced processing for microfabrication of transparent materials using a Q-switched Nd:YAG laser
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Abstract
A laser-induced plasma in laser-material interaction due to the fact that it is in an extreme state of high-energy concentration is shown to be a powerful tool to perform drilling process to create micro channels in bulk quartz substrates under certain conditions. The plasma was induced by a Q-Switched Nd:YAG laser incident to a quartz substrate after pre-damaged by thermal-induced processing. The channels are of high quality with smooth kerf surface and the dimension of channels can be controlled from around 25 to 140 microns by a software program that interfaces with the laser system. A study of the dependence of drilling rate on the depth of channels provides a straightforward method for controlling the formation of plasma. The process technology, process characterization, and initial test results of the fabricated micro channels are presented in this paper.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Z. Z. Zhang and Shui Jie Qin "Plasma-induced processing for microfabrication of transparent materials using a Q-switched Nd:YAG laser", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582164
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