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8 October 2004 Creation of carbide in critical CO2 by UV laser
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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596534
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan
Abstract
A YAG laser of 266 nm is focused just above or at the surface of a Ni substrate in a near critical CO2 chamber. Since the compressibility of CO2 becomes very high, strong shock waves may be produced by laser irradiation. We are going to investigate the dependence of the nano structures for nickel and CO2 on the laser power and the focus point. After the laser radiation, we found fine grains on the Ni substrate with a scanning electron microscopy and energy dispersive X-ray spectroscopy.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Taku Arai, Takaya Uchida, Naohiro Fukuda, Yoshikazu Yoshida, and Toru Maekawa "Creation of carbide in critical CO2 by UV laser", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596534
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