8 October 2004 Fabrication of cylindrical plastic microlens using Er:YAG laser beam: influence of process parameters
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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596306
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan
Abstract
Microlenses are widely used as components of optical device in LCD display, optical interconnection, scanner and others. It is important to fabricate microlens in any kind of form to satisfy any requirement of optical device. Also, the integration of microlens and optical devices is required to save weight, reduce production cost, and get higher accurate alignment. We have developed a novel method to fabricate spherical plastic microlens using Er:YAG laser beam. In this method, laser beam are shot to the surface of an acrylate resin to form microlens on this surface. In this paper, a method to fabricate cylindrical plastic microlens is proposed. Microlenses are fabricated under several conditions, and the influences of process parameters to geometry of microlens will be discussed.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hery Mochtady, Hery Mochtady, Keiji Yamada, Keiji Yamada, Takashi Ueda, Takashi Ueda, Akira Hosokawa, Akira Hosokawa, } "Fabrication of cylindrical plastic microlens using Er:YAG laser beam: influence of process parameters", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596306; https://doi.org/10.1117/12.596306
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