Fabrication of microlens using CO2laser

Hiroshi Murotani; Kenji Nakamoto; Hideo Fukumoto; Moriaki Wakaki

doi:10.1117/12.596304

8 October 2004 Fabrication of microlens using CO₂ laser

Hiroshi Murotani, Kenji Nakamoto, Hideo Fukumoto, Moriaki Wakaki

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596304
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Microlenses were formed directly on a surface of a glass plate by using CO₂ laser. This method has the merit of complete dry processing and presents simple way of microlens fabrication. We discuss about the formation process and mechanism through the characterization of irradiation parameters and the glass composition. When the surface of a glass plate is heated locally to a working point of the glass material by a focused CO₂ laser beam, a microlens is formed owing to surface tension. It was found possible to fabricate microlens easily placed at different focal position by controlling a laser power and an irradiation time. The volume of the fabricated microlens was found to be dependent on laser irradiation energy (laser power x irradiation time) and irradiated position. When a Corning 7059 glass plate was used, a convex microlens was obtained at the energy density smaller than ca. 100 (μJ/μm²).

Citation Download Citation

Hiroshi Murotani, Kenji Nakamoto, Hideo Fukumoto, and Moriaki Wakaki "Fabrication of microlens using CO₂ laser", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596304

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