Fabrication of microspike-arrays on tungsten surface using femtosecond laser

Tomokazu Sano; Masato Yanai; Etsuji Ohmura; Yasumitsu Nomura; Isamu Miyamoto; Akio Hirose; Kojiro F. Kobayashi

doi:10.1117/12.596777

8 October 2004 Fabrication of microspike-arrays on tungsten surface using femtosecond laser

Tomokazu Sano, Masato Yanai, Etsuji Ohmura, Yasumitsu Nomura, Isamu Miyamoto, Akio Hirose, Kojiro F. Kobayashi

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596777
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. Natural logarithm of the calculated intensity distributions diffracted at the edge of the mask opening was qualitatively consistent with the experimental results of the shape and arrays of microspikes fabricated. The shape and the array of microspikes depend on the intensity distribution diffracted at the edge of the mask opening. This microspike-array has a potential to be micro emitter tips.

Citation Download Citation

Tomokazu Sano, Masato Yanai, Etsuji Ohmura, Yasumitsu Nomura, Isamu Miyamoto, Akio Hirose, and Kojiro F. Kobayashi "Fabrication of microspike-arrays on tungsten surface using femtosecond laser", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596777

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