8 October 2004 Fabrication of microspike-arrays on tungsten surface using femtosecond laser
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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596777
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan
Abstract
Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. Natural logarithm of the calculated intensity distributions diffracted at the edge of the mask opening was qualitatively consistent with the experimental results of the shape and arrays of microspikes fabricated. The shape and the array of microspikes depend on the intensity distribution diffracted at the edge of the mask opening. This microspike-array has a potential to be micro emitter tips.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tomokazu Sano, Tomokazu Sano, Masato Yanai, Masato Yanai, Etsuji Ohmura, Etsuji Ohmura, Yasumitsu Nomura, Yasumitsu Nomura, Isamu Miyamoto, Isamu Miyamoto, Akio Hirose, Akio Hirose, Kojiro F. Kobayashi, Kojiro F. Kobayashi, } "Fabrication of microspike-arrays on tungsten surface using femtosecond laser", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596777; https://doi.org/10.1117/12.596777
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