Thermo-mechanical damage analysis of through-hole formation by laser drilling for 3D opto-electronic device assembly

Kiyokazu Yasuda; Masanao Kobayashi; Kozo Fujimoto

doi:10.1117/12.596735

8 October 2004 Thermo-mechanical damage analysis of through-hole formation by laser drilling for 3D opto-electronic device assembly

Kiyokazu Yasuda, Masanao Kobayashi, Kozo Fujimoto

Author Affiliations +

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596735
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

In order to achieve high packaging density and high performance of LSI assembly, 3D stacking approach of electronic and opto-electronic devices has been considered where chip to chip interconnections are realized via micro through-holes formed by rapid excimer laser drilling. Since local damages due to temperature increase and thermal stress might cause device degradation, it is crucial for the process optimization to evaluate the quantity of thermal and stress fields around holes. In this study, we conducted transient thermo-mechanical finite element analysis for laser drilling of GaAs and Si chips considering temperature dependence of materials properties. Relationship among laser fluence, pulse width, repetition times, and the temperature increase and thermal stress are thoroughly investigated using 2-dimensional axisymmetric models.

Citation Download Citation

Kiyokazu Yasuda, Masanao Kobayashi, and Kozo Fujimoto "Thermo-mechanical damage analysis of through-hole formation by laser drilling for 3D opto-electronic device assembly", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596735

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available