Laser microfabrication is currently one of key technologies for manufacturing various kinds of microdevices and microsystems. Additionally, three-dimensional (3-D) laser microfabrication is getting more important and more desirable for integrating functions and miniaturizing the size of devices and systems. The present paper describes a variety of 3-D laser microfabrication based on chemical vapor deposition (CVD), ablation modification and lithography. One of the hottest topics in this field is fabrication of 3-D microstructures embedded in transparent materials by multiphoton absorption process using femtosecond laser. Advantages of 3-D laser microfabrication is also discussed by comparison with competitive techniques like mechanical machining, electron beam processing and ion beam processing.
Koji Sugioka, Koji Sugioka,
"Three-dimensional laser microfabrication", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.595676; https://doi.org/10.1117/12.595676