8 October 2004 Three-dimensional laser microfabrication
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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.595676
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan
Abstract
Laser microfabrication is currently one of key technologies for manufacturing various kinds of microdevices and microsystems. Additionally, three-dimensional (3-D) laser microfabrication is getting more important and more desirable for integrating functions and miniaturizing the size of devices and systems. The present paper describes a variety of 3-D laser microfabrication based on chemical vapor deposition (CVD), ablation modification and lithography. One of the hottest topics in this field is fabrication of 3-D microstructures embedded in transparent materials by multiphoton absorption process using femtosecond laser. Advantages of 3-D laser microfabrication is also discussed by comparison with competitive techniques like mechanical machining, electron beam processing and ion beam processing.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Koji Sugioka, Koji Sugioka, } "Three-dimensional laser microfabrication", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.595676; https://doi.org/10.1117/12.595676
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