Optical coherence tomography based on high-speed scanning MEMS mirror

Woonggyu Jung; Daniel T. McCormick; Jun Zhang; Norman C. Tien; Zhongping Chen

doi:10.1117/12.592872

13 April 2005 Optical coherence tomography based on high-speed scanning MEMS mirror

Woonggyu Jung, Daniel T. McCormick, Jun Zhang, Norman C. Tien, Zhongping Chen

Proceedings Volume 5690, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine IX; (2005) https://doi.org/10.1117/12.592872
Event: SPIE BiOS, 2005, San Jose, CA, United States

Abstract

An optical coherence tomography (OCT) system based on a high-speed microelectromechanical system (MEMS) mirror is presented. This scanning mirror has high-speed performance because it was actuated by vertical comb drive. The size of mirror was 600 mm x 600 mm and the resonant frequencies were between 3.5 kHz to 8 kHz. In the test of scanner itself, it was operated linearly and scanned up to 30 degree angle. The MEMS mirror also provides 2-axis scanning while occupying a very small volume with extremely low power consumption. In our study, it was integrated with conventional fiber based OCT system. Via 2-axis lateral scanning, combined with an axial scan, a volume (2 mm x 2 mm x 1.4 mm) image of tissue, including a cancerous region, from a hamster cheek pouch was obtained. The axial and lateral resolution of images are 10 mm and about 20 mm respectively.

Citation Download Citation

Woonggyu Jung, Daniel T. McCormick, Jun Zhang, Norman C. Tien, and Zhongping Chen "Optical coherence tomography based on high-speed scanning MEMS mirror", Proc. SPIE 5690, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine IX, (13 April 2005); https://doi.org/10.1117/12.592872

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available