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13 April 2005 Optical coherence tomography based on high-speed scanning MEMS mirror
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Abstract
An optical coherence tomography (OCT) system based on a high-speed microelectromechanical system (MEMS) mirror is presented. This scanning mirror has high-speed performance because it was actuated by vertical comb drive. The size of mirror was 600 mm x 600 mm and the resonant frequencies were between 3.5 kHz to 8 kHz. In the test of scanner itself, it was operated linearly and scanned up to 30 degree angle. The MEMS mirror also provides 2-axis scanning while occupying a very small volume with extremely low power consumption. In our study, it was integrated with conventional fiber based OCT system. Via 2-axis lateral scanning, combined with an axial scan, a volume (2 mm x 2 mm x 1.4 mm) image of tissue, including a cancerous region, from a hamster cheek pouch was obtained. The axial and lateral resolution of images are 10 mm and about 20 mm respectively.
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Woonggyu Jung, Daniel T. McCormick, Jun Zhang, Norman C. Tien, and Zhongping Chen "Optical coherence tomography based on high-speed scanning MEMS mirror", Proc. SPIE 5690, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine IX, (13 April 2005); https://doi.org/10.1117/12.592872
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