Development of line-shaped optical system for YAG2omega laser annealing used in the manufacture of low-temperature poly-Si TFT

Tatsuki Okamoto; Kazutoshi Morikawa; Atsuhiro Sono; Yukio Sato; Junichi Nishimae

doi:10.1117/12.590383

12 April 2005 Development of line-shaped optical system for YAG2ω laser annealing used in the manufacture of low-temperature poly-Si TFT

Tatsuki Okamoto, Kazutoshi Morikawa, Atsuhiro Sono, Yukio Sato, Junichi Nishimae

Author Affiliations +

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.590383
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

We have developed a new optical system that transforms the circle profile beam generated with near Gaussian intensity distribution by the YAG2ω laser (second harmonics of a Q-switched Nd:YAG laser) into a line-profile beam. This transformed bean has uniform distribution to within 5% in the longitudinal direction, and is about 100 mm long and 40 micron wide. For homogenization in the longitudinal direction, we employ a waveguide plate homogenizer. The laser beam is divided by waveguide plates, and the divided beams are overlapped on the surface of the works. We successfully reduced interference fringes by increasing the fixed optical pass difference beyond the inherent time and coherent length for every divided pair of adjacent beams under a controlled space coherent length. In the width direction, the laser beam is focused up to the limited M² value.

Citation Download Citation

Tatsuki Okamoto, Kazutoshi Morikawa, Atsuhiro Sono, Yukio Sato, and Junichi Nishimae "Development of line-shaped optical system for YAG2ω laser annealing used in the manufacture of low-temperature poly-Si TFT", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.590383

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