Laser doping of germanium

T. J. Mahaney; Andrey V. Muravjov; Maxim V. Dolguikh; Thomas Andrew Winningham; Robert E. Peale; Zhaoxu Tian; Sachin Bet; Aravinda Kar; Mikhail Klimov

doi:10.1117/12.585470

12 April 2005 Laser doping of germanium

T. J. Mahaney, Andrey V. Muravjov, Maxim V. Dolguikh, Thomas Andrew Winningham, Robert E. Peale, Zhaoxu Tian, Sachin Bet, Aravinda Kar, Mikhail Klimov

Author Affiliations +

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.585470
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

A direct-write pulsed Nd:yttrium-aluminum-garnet laser treatment in an aluminum-containing gas was applied to the polished surface of an undoped Ge wafer. After KOH etching to remove metallic aluminum deposited on the surface, secondary ion mass spectroscopy (SIMS) revealed ~60-200 nm penetration for Al at a concentration of ~10¹⁷ cm^-3. Atomic force microscopy showed that surface roughness is much less than the measured penetration depth. Laser doping of Ge is a potential low cost, selective-area, and compact method, compared with ion-implantation, for production of high current ohmic contacts in Ge and SiGe opto-electronic devices.

Citation Download Citation

T. J. Mahaney, Andrey V. Muravjov, Maxim V. Dolguikh, Thomas Andrew Winningham, Robert E. Peale, Zhaoxu Tian, Sachin Bet, Aravinda Kar, and Mikhail Klimov "Laser doping of germanium", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.585470

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available