Laser microstructuring of silicon in dry and wet environments

Sergey I. Kudryashov; Jacob M. Small; Susan D. Allen

doi:10.1117/12.587191

12 April 2005 Laser microstructuring of silicon in dry and wet environments

Sergey I. Kudryashov, Jacob M. Small, Susan D. Allen

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.587191
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

The impact effect of a vapor recoil pressure on single-shot threshold-like laser micro-structuring of Si via the Kelvin- Helmholtz-type instability has been revealed during transient and postmortem studies of explosive boiling of predeposited micron-size water droplets on a Si wafer surface. The micro-structuring mechanism assumes local excitation of surface capillary waves in a molten surface layer of the material underneath each water droplet by near-GPa recoil pressure of explosively boiling water and the following steam bubble oscillations. Water droplets and produced structural features (micron-size craters, bumps or others) have exhibited high symmetries in their surface arrangements. Similar structures were also observed on dry clean Si surfaces irradiated by single fs-laser pulses resulted from the same "impact" excitation of surface capillary waves in the Coulomb explosion regime.

Citation Download Citation

Sergey I. Kudryashov, Jacob M. Small, and Susan D. Allen "Laser microstructuring of silicon in dry and wet environments", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.587191

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