Optical properties of pulsed-laser deposited BaTiO<sub>3</sub> thin films

Jie Xu; Daniel P. Durisin; Gregory W. Auner

doi:10.1117/12.584639

12 April 2005 Optical properties of pulsed-laser deposited BaTiO₃ thin films

Jie Xu, Daniel P. Durisin, Gregory W. Auner

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.584639
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Thin films of barium titanate (BaTiO₃) have been grown on Si (100) and UV fused silica substrates using KrF pulsed-laser deposition (PLD). The films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and UV/VIS/NIR spectroscopy. Smooth and stoichiometric films were grown on Si (100) substrate at O₂ pressure range of 10-30 mTorr and substrate temperature of 600°C-620°C. The XRD patterns of the films revealed the polycrystalline peaks with a preferential orientation. The optical properties of BaTiO₃ films were investigated in terms of UV-VIS transmission spectrum of the films deposited on UV fused silica substrate. The spectral dependences of refractive index and absorption coefficient, and the thickness of the films have been calculated from optical transmission measurements using the envelope method. The band gap energy (Eg) of BaTiO₃ films was found to be 3.35eV.

Citation Download Citation

Jie Xu, Daniel P. Durisin, and Gregory W. Auner "Optical properties of pulsed-laser deposited BaTiO₃ thin films", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.584639

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