Translator Disclaimer
Paper
12 April 2005 Scope for electric field assisted removal of ablated debris from laser machined features in silicon
Author Affiliations +
Abstract
The problem created by the re-deposition of ablated material when laser machining structures in silicon wafers is investigated. The study focuses on the specific case of machining wafer grade silicon with femtosecond pulses centered at a wavelength of 775 nm. Based on the evidence that a highly ionised plasma state exists immediately after laser ablation, this work explores the potential of using electric fields to channel the debris out of the laser machined feature before it becomes deposited. To this extent the work discusses the step-by-step development of different experimental arrangements, by first evaluating its effects, then identifying its limitations and finally by proposing and investigating potential solutions. It is found that a reduction in the amount of re-deposited debris is observed when a carrier-depleted region is generated in silicon materials.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward Coyne, Paul Mannion, Gerard M. O'Connor, Sebastian Favre, and Thomas J. Glynn "Scope for electric field assisted removal of ablated debris from laser machined features in silicon", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.594529
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
Back to Top