12 April 2005 Surface microfabrication of silica glass by LIBWE using DPSS-UV laser
Author Affiliations +
Abstract
Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solid state UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of Galvanometer-based point scanning system with the laser beam. This method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass in a convetional atmospheric environment.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroyuki Niino, Yoshizo Kawaguchi, Tadatake Sato, Aiko Narazaki, Ryozo Kurosaki, "Surface microfabrication of silica glass by LIBWE using DPSS-UV laser", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.589933; https://doi.org/10.1117/12.589933
PROCEEDINGS
6 PAGES


SHARE
Back to Top