12 April 2005 Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials
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Abstract
For the first time, sub-100 nm nanostructuring as well as five-dimensional (5D) multiphoton analysis with submicron spatial resolution, 270 ps temporal resolution and 10 nm spectral resolution have been performed on metal films, semiconductors, polymers and biological tissues using near infrared, 80/90 MHz femtosecond laser pulses at <3nJ pulse energy. A compact (65x62x48 cm3) multiport laser scanning microscope FemtoCut (JenLab GmbH) equipped with fast detectors for time-correlated single photon counting and a Sagnac interferometer for spectral imaging as well as the ZEISS laser scanning microscope LSM 510 Meta-NLO have been employed. Laser excitation radiation was provided by a tuneable turn-key, one-box Chameleon as well as a MaiTai Ti:sapphire laser oscillator. We were able to perform precise multiphoton nanopatterning of gold films, photoresists and polymers with submicron (cut) sizes. Interestingly, sub-80 nm laser-induced periodic surface structures (LIPPS) have been created in silicon wafers and used to produce nanostructured 2D silicon arrays.
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Karsten Konig, Iris Riemann, Herbert Schuck, Daniel Sauer, Thomas Velten, Ronan Le Harzic, "Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.590400; https://doi.org/10.1117/12.590400
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