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Notch reduction in silicon on insulator (SOI) structures using a time division multiplex etch processes
Polymeric microfluidic devices for the monitoring and separation of water-borne pathogens utilizing insulative dielectrophoresis
Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser
Fabrication of 3D microstructure and analysis of voxel generation by ultrafast-laser-induced two-photon absorption
Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS
Characterization of thin films and stack in MOEMS structure with ellipsometry and reflectometry techniques