Effects of laser-induced plasma in machining of transparent materials

Viktor M. Kadan; Ivan V. Blonsky; Vadim O. Salnikov; Evgen V. Orieshko

doi:10.1117/12.589607

22 January 2005 Effects of laser-induced plasma in machining of transparent materials

Viktor M. Kadan, Ivan V. Blonsky, Vadim O. Salnikov, Evgen V. Orieshko

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.589607
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

In this paper we report a new practical method of micromachining of transparent materials involving laser-induced plasma, using a conventional Q-switched Nd:KGW laser (1,06 μm). Micromarks and relieve grating with 3 μm pitch have been fabricated in sapphire, silica and glass, including the use of a LC numerical indicator as a mask. Influence of the cross-section size of a shined area on machining results was studied. It was found, that the density and temperature of laser-induced plasma at constant energy density of laser radiation rise with the increase of the cross-section size. Laser-induced plasma influences the ablation rate of transparent materials and metals in the opposite way.

Citation Download Citation

Viktor M. Kadan, Ivan V. Blonsky, Vadim O. Salnikov, and Evgen V. Orieshko "Effects of laser-induced plasma in machining of transparent materials", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.589607

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