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22 January 2005 Effects of laser-induced plasma in machining of transparent materials
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Abstract
In this paper we report a new practical method of micromachining of transparent materials involving laser-induced plasma, using a conventional Q-switched Nd:KGW laser (1,06 μm). Micromarks and relieve grating with 3 μm pitch have been fabricated in sapphire, silica and glass, including the use of a LC numerical indicator as a mask. Influence of the cross-section size of a shined area on machining results was studied. It was found, that the density and temperature of laser-induced plasma at constant energy density of laser radiation rise with the increase of the cross-section size. Laser-induced plasma influences the ablation rate of transparent materials and metals in the opposite way.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Viktor M. Kadan, Ivan V. Blonsky, Vadim O. Salnikov, and Evgen V. Orieshko "Effects of laser-induced plasma in machining of transparent materials", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.589607
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