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22 January 2005 MEMS fabrication process management environment
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Abstract
New microfabrication technologies in the MEMS domain require novel approaches in computer aided design. Process issues in these technologies affecting the design are becoming increasingly important and Process information held in static design rule sets will be no longer sufficient. This paper describes the methodology and the implementation of a process management system that supports the designer in configuring application specific process flows with predictable properties.
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Jens Popp, Thilo Schmidt, Andreas Wagener, and Kai Hahn "MEMS fabrication process management environment", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.590276
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