Small devices manufacturing by copper vapor laser

Sergey G. Gorney; Igor V. Polyakov; Mikhail O. Nikonchuk

doi:10.1117/12.590092

22 January 2005 Small devices manufacturing by copper vapor laser

Sergey G. Gorney, Igor V. Polyakov, Mikhail O. Nikonchuk

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.590092
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

The interaction between laser beam and metal, and micromachining technology for small-diameter metal tubes by means of a copper vapour laser are considered. The quality and productivity of cutting have been analysed from a point of view of the laser beam intensity distribution in the treatment zone. The divergence of laser beam and its power have been selected to ensure a minimal cut wall roughness with the maximal production rate being preserved. A stent cutting technology for cardio surgery is presented. The technology equipment has been described for precision cutting of products with a cylindrical surface. Tiny devices being cut out from non-metal material

Citation Download Citation

Sergey G. Gorney, Igor V. Polyakov, and Mikhail O. Nikonchuk "Small devices manufacturing by copper vapor laser", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.590092

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