Dynamic excitation: a noninvasive technique for initiating stiction repair in MEMS

Amit A. Savkar; Kevin D. Murphy; Matthew R. Begley

doi:10.1117/12.590849

22 January 2005 Dynamic excitation: a noninvasive technique for initiating stiction repair in MEMS

Amit A. Savkar, Kevin D. Murphy, Matthew R. Begley

Proceedings Volume 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV; (2005) https://doi.org/10.1117/12.590849
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Commercial applications of micro-electromechanical systems (MEMS) continue to be plagued by reliability issues encountered during fabrication and operation. One of the most prevalent problems is the adhesion between adjacent components since adhesive forces are known to promote wear and defect-related failures. In extreme circumstances, the adhesion is large enough to prevent separation, a phenomenon commonly referred to as stiction-failure. The objective of current work is to determine analytically whether dynamic excitation may be used to repair stiction-failed cantilevers. This is accomplished by relating the structural dynamic response to the de-cohesion of stiction-failed micro-cantilever beams under various loading conditions.

Citation Download Citation

Amit A. Savkar, Kevin D. Murphy, and Matthew R. Begley "Dynamic excitation: a noninvasive technique for initiating stiction repair in MEMS", Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); https://doi.org/10.1117/12.590849

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