22 January 2005 Surface profiler for fixed through-glass measurement
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Abstract
An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.
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Sen Han, Sen Han, Erik Novak, Erik Novak, John Wissinger, John Wissinger, Bryan W. Guenther, Bryan W. Guenther, Trisha Browne, Trisha Browne, Emilio Yanine, Emilio Yanine, Michael Schurig, Michael Schurig, J. D. Herron, J. D. Herron, Christy McCloy, Christy McCloy, Xueyuan Li, Xueyuan Li, Michael B. Krell, Michael B. Krell, Jim Harris, Jim Harris, } "Surface profiler for fixed through-glass measurement", Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); doi: 10.1117/12.597080; https://doi.org/10.1117/12.597080
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