Discrete microactuator of arbitrary positioning for linearization of VOA characteristic

Jong Hyun Lee; Man Geun Kim

doi:10.1117/12.591204

22 January 2005 Discrete microactuator of arbitrary positioning for linearization of VOA characteristic

Jong Hyun Lee, Man Geun Kim

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.591204
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

We proposed a discrete microactuator enabling a nonlinear displacement with respect to digital input by employing electrostatic comb electrodes of curved shape. The comb electrodes were designed to implement a linearization in variable optical attenuator (VOA) with a constant step of 0.5 dB. The experimental insertion loss (IL) was 1.1 dB and attenuation range was 32.6 dB with 4.2% in linearity.

Citation Download Citation

Jong Hyun Lee and Man Geun Kim "Discrete microactuator of arbitrary positioning for linearization of VOA characteristic", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.591204

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