22 January 2005 Electrostatic microrelays with adjustable parameters
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Abstract
Basic layout of micro-relays based on electrostatic operation principle with adjustable parameters (ESRA) for flat-parallel electrodes placement is characterised by that the anchor with immovable electrode is connected with base substrate by elastic holders and is fixed on a reversing electro-mechanical micro-drive. The ledges are formed in the elastic holders in an appointed place and at a designed height, on which the contacts of controlling circuit are placed. Due to elastic bond of the anchor, the micro-drive enable to change gradually inter-electrodes distance t providing stepless Uon adjustment in the 0.03 to 2.80 range of nominal operation voltage. Simultaneously, the tc increases or decreases proportionally maintaining the appointed value of ΔU gradient of Uon and Uoff voltages. In practice, the minimum ΔU value could be close to zero. Hence, the ESRA of the same typical size could operate in electric circuits under various fixed Uon values. Its usage is particularly effective in layouts providing non-stationary processes control (for instance, variation of temperature or effort in accordance with appointed program) owing to corresponding set of necessary inter-electrodes distance using the micro-drive.
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Nikolay Ivanovich Mukhurov, Nikolay Ivanovich Mukhurov, Georgiy Ignatievich Efremov, Georgiy Ignatievich Efremov, } "Electrostatic microrelays with adjustable parameters", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.591441; https://doi.org/10.1117/12.591441
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