22 January 2005 Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation
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We report on experimental work that characterizes the frequency response of resonators of Microfabricated Acoustic Spectrum Analyzer (MASA) devices which were fabricated using Sandia's SUMMiT processing technology. A 1.1 micron silicon nitride layer was used in the fabrication to isolate the sense mechanism from the actuation mechanism. The devices are actuated using electrostatic vertical comb-drive actuation in a 30-50 mTorr vacuum and the frequency response is measured using a piezo-resistive readout mechanism. Two MASA devices are tested using comb-drive ac signals (e.g., 200mV) superimposed on a dc bias (e.g., 15V). In addition, dc bias voltages placed on the comb-drive are shown to tune the resonant frequency of the resonator. The frequency response of the piezo-resistive readout mechanism is measured using a 10V dc supply voltage supplied across its Wheatstone bridge. The results show that the piezo-resistive readout mechanism can detect resonant behavior and determine resonant frequency. A laser doppler vibrometer is used as an independent means to characterize the frequency response and verify the results.
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Harold L. Stalford, Harold L. Stalford, David S. Epp, David S. Epp, } "Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.590876; https://doi.org/10.1117/12.590876

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