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22 January 2005 Large silicon micromirror modeling and fabrication
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Abstract
Electrostatic micromirrors are yet a well-known topic in the world of MOEMS. But in some specific cases, the mirror dimensions should have to be extended in order to be able to switch beams of a larger diameter. In other words, the convergence in dimensions between electronic technologies and classical machining in the range of hundreds microns to millimetre was not yet explored. This is the context of our study, whose goal is to make digital switching devices with a size of some millimetres and a large, pre-fixed deflection angle of ten degrees.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexandre Marchese, Henri Camon, and Christian Ganibal "Large silicon micromirror modeling and fabrication", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.590270
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