Anodically bonded silicon-glass optical chip for biochemical sensing applications

Luca De Stefano; Krzysztof Malecki; Luigi Moretti; Ivo Rendina

doi:10.1117/12.591696

22 January 2005 Anodically bonded silicon-glass optical chip for biochemical sensing applications

Luca De Stefano, Krzysztof Malecki, Luigi Moretti, Ivo Rendina

Proceedings Volume 5718, Microfluidics, BioMEMS, and Medical Microsystems III; (2005) https://doi.org/10.1117/12.591696
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.

Citation Download Citation

Luca De Stefano, Krzysztof Malecki, Luigi Moretti, and Ivo Rendina "Anodically bonded silicon-glass optical chip for biochemical sensing applications", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.591696

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