22 January 2005 Anodically bonded silicon-glass optical chip for biochemical sensing applications
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In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luca De Stefano, Luca De Stefano, Krzysztof Malecki, Krzysztof Malecki, Luigi Moretti, Luigi Moretti, Ivo Rendina, Ivo Rendina, } "Anodically bonded silicon-glass optical chip for biochemical sensing applications", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591696; https://doi.org/10.1117/12.591696


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