22 January 2005 Anodically bonded silicon-glass optical chip for biochemical sensing applications
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Abstract
In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.
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Luca De Stefano, Luca De Stefano, Krzysztof Malecki, Krzysztof Malecki, Luigi Moretti, Luigi Moretti, Ivo Rendina, Ivo Rendina, } "Anodically bonded silicon-glass optical chip for biochemical sensing applications", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591696; https://doi.org/10.1117/12.591696
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