Diode laser bonding of planar microfluidic devices, MOEMS, bioMEMS, diagnostic chips, and microarrays

Jie-Wei Chen; Jerry M. Zybko

doi:10.1117/12.609874

22 January 2005 Diode laser bonding of planar microfluidic devices, MOEMS, bioMEMS, diagnostic chips, and microarrays

Jie-Wei Chen, Jerry M. Zybko

Proceedings Volume 5718, Microfluidics, BioMEMS, and Medical Microsystems III; (2005) https://doi.org/10.1117/12.609874
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

The assembly of plastic microfluidic devices, MOEMS and microarrays requiring high positioning and welding accuracy in the micrometer range, has been successfully achieved using a new technology based on laser transmission welding combined with a photolithographic mask technique. This paper reviews a laser assembly platform for the joining of microfluidic plastic parts with its main related process characteristics and its potential for low-cost and high volume manufacturing. The system consists of a of diode laser with a mask and an automated alignment function to generate micro welding seams with freely definable geometries. A fully automated mask alignment system with a resolution of < 2 μm and a precise, noncontact energy input allows a fast welding of micro structured plastic parts with high reproducibility and excellent welding quality.

Citation Download Citation

Jie-Wei Chen and Jerry M. Zybko "Diode laser bonding of planar microfluidic devices, MOEMS, bioMEMS, diagnostic chips, and microarrays", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.609874

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available