22 January 2005 Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)
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Abstract
This paper reports a research effort to design, microfabricate, and test a uniquely designed waveguide technology with integrated micro-lenses in vertical orientations. The waveguide and integrated focusing lenses were microfabricated using thick photo-resist such as SU-8 with UV-light lithography. The waveguide can be used in various biological and biomedical systems.
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Ren Yang, Ren Yang, Steven A. Soper, Steven A. Soper, Wanjun Wang, Wanjun Wang, } "Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591956; https://doi.org/10.1117/12.591956
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