22 January 2005 Rapid prototyping of plastic microfluidic devices in cyclic olefin copolymer (COC)
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Proceedings Volume 5718, Microfluidics, BioMEMS, and Medical Microsystems III; (2005); doi: 10.1117/12.591852
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States
Abstract
In this paper, we report on using polydimethylsiloxane (PDMS) tools to emboss cyclic olefin copolymer (COC). Positive photoresist AZP 4620 was used to fabricate 5 and 20 μm thick PDMS tools. The embossed microchannels were 10 μm to 100 μm in width at 10 μm to 100 μm in spacing. The COC embossing parameters, including temperature, force, and time were optimized to reduce replication errors. The optimized process was then successfully applied to fabrication of a passive microfluidic mixer designed and simulated using CFDRC ACE+.
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Jin-Hwan Lee, Erik T. K. Peterson, Gabriel Dagani, Ian Papautsky, "Rapid prototyping of plastic microfluidic devices in cyclic olefin copolymer (COC)", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591852; https://doi.org/10.1117/12.591852
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KEYWORDS
Semiconducting wafers

Microfluidics

Polymethylmethacrylate

Photoresist materials

Silicon

Device simulation

Polymers

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