22 January 2005 Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer
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Abstract
There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane and electrostatically actuated torsional micromirror. The application of membrane-type structure is in the area of pressure sensors. The monolithically integrated MZI on movable torsional mirror seems to be an easy solution for monitoring mechanical performances during lifetime of micromirror.
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Christophe Gorecki, Lukasz Nieradko, Andrei Sabac, Michal Jozwik, Alain Jackobelli, Thierry Dean, Rolf Hoffman, Andreas Bertz, "Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.592237; https://doi.org/10.1117/12.592237
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