Polymer-based micro-deformable mirror for adaptive optics applications

Frederic Zamkotsian; Veronique Conedera; Arnaud Liotard; Andreas Schroeder; Norbert Fabre; Henri Camon; Patrick Lanzoni

doi:10.1117/12.592422

22 January 2005 Polymer-based micro deformable mirror for adaptive optics applications

Frederic Zamkotsian, Veronique Conedera, Arnaud Liotard, Andreas Schroeder, Norbert Fabre, Henri Camon, Patrick Lanzoni

Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.592422
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Next generation giant telescopes as well as next generation instrumentation for 10m-class telescopes relies on the availability of highly performing adaptive optical systems, for studying new fields like circumstellar disks and extrasolar planets. These systems require deformable mirrors with very challenging parameters, including number of actuators up to 250 000 and inter-actuator spacing around 500μm. MOEMS-based devices are promising for future deformable mirrors. However, only limited strokes for large driving voltages have been demonstrated. In order to overcome these limitations, we are currently developing a micro-deformable mirror based on an array of electrostatic actuators with attachment posts to a continuous mirror on top. The originality of our approach lies in the elaboration of a sacrificial layer and of a structural layer made of polymer materials, using low-temperature process. This process allows the realization of high optical quality mirrors on top of an actuator array made with various techniques. We have developed the first polymer piston-motion actuator in order to reach high strokes for low driving voltages: a 10μm thick mobile plate with four springs attached to the substrate, and with an air gap of 10μm exhibits a piston motion of 2μm for 30V. Preliminary comparison with FEM models show very good agreement and design of a complete polymer-based MDM looks possible.

Citation Download Citation

Frederic Zamkotsian, Veronique Conedera, Arnaud Liotard, Andreas Schroeder, Norbert Fabre, Henri Camon, and Patrick Lanzoni "Polymer-based micro deformable mirror for adaptive optics applications", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.592422

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