22 January 2005 Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control
Author Affiliations +
This paper presents high-resolution control of torsional electrostatic micromirrors beyond their inherent pull-in instability using robust sliding-mode control (SMC). The objectives of this paper are two-fold - firstly, to demonstrate the applicability of SMC for MEMS devices; secondly - to present a modified SMC algorithm that yields improved control accuracy. SMC enables compact realization of a robust controller tolerant of device characteristic variations and nonlinearities. Robustness of the control loop is demonstrated through extensive simulations and measurements on MEMS with a wide range in their characteristics. Control of two-axis gimbaled micromirrors beyond their pull-in instability with overall 10-bit pointing accuracy is confirmed experimentally. In addition, this paper presents an analysis of the sources of errors in discrete-time implementation of the control algorithm. To minimize these errors, we present an adaptive version of the SMC algorithm that yields substantial performance improvement without considerably increasing implementation complexity.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Harshad S. Sane, Harshad S. Sane, Navid Yazdi, Navid Yazdi, Carlos H. Mastrangelo, Carlos H. Mastrangelo, } "Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.600083; https://doi.org/10.1117/12.600083

Back to Top