Testing of MEMS/MOEMS/MNT devices and systems

Henne van Heeren; Ayman El-Fatatry; Lia Paschalidou; Patric R. Salomon

doi:10.1117/12.598246

22 January 2005 Testing of MEMS/MOEMS/MNT devices and systems

Henne van Heeren, Ayman El-Fatatry, Lia Paschalidou, Patric R. Salomon

Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.598246
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Unlike electronic devices, where for analysis only electrical parameters need to be tested, Micro and Nano Technology (MNT) devices require precise measurement of multi domain parameters for characterization. Furthermore, the sensitivities require other or improved technologies. For instance, for testing a MEMS device, a stable supply of physical energy is required and must be transferred to the product in a reproducible way. Also a sensitive measuring technology is necessary to detect the electrical signal produced as a response to the physical energy on the device. Sometimes interactions between input and output make measuring difficult. A third point is that handling of the devices is difficult due to their non-standard sizes and small dimension. Also MST including MEMS and MOEMS devices require new types of reliability testing addressing stiction, and other specific failure modes. Thus, the testing of MNT devices is much more complex than standard electronic components. Currently standardized tests are often not available, neither is there sufficient background information available about MNT testing, as most of the companies regard testing experience, and especially product testing, as company confidential information. However, the MNT industry can utilise existing testing equipment. This article addresses the available equipment for MNT testing in relation to the industry needs. Examples of the instruments discussed include optical profilers for dynamic measurement of MOEMS/MEMS devices, such as gyros and accelerometers, and wafer testers for optical products.

Citation Download Citation

Henne van Heeren, Ayman El-Fatatry, Lia Paschalidou, and Patric R. Salomon "Testing of MEMS/MOEMS/MNT devices and systems", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.598246

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available