22 January 2005 CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication
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Multi-photon three-dimensional micro-/nano-fabrication (3DM) is a powerful technique for creating complex 3D micro-scale structures of the type needed for micro-electromechanical systems (MEMS), micro-optics, and microfluidics. In 3DM high peak-power laser pulses are tightly focused into a medium which undergoes a physical or chemical change following multi-photon excitation at the focal point. Complex structures are generated by serial 3D-patterned exposure within the material volume. To further the application of 3DM to micro-component engineering, we are developing a fully automated and integrated 3DM system capable of creating complex cross-linked polymer structures based on patterns designed in a CAD environment. The system consists of four major components: (1) a femtosecond laser and opto-mechanical system; (2) 3-axis micro-positioner; (3) a computer-controlled fabrication interface; and (4) software for fabrication-path planning. The path-planning software generates a 3DM command sequence based on an object-design input file created using standard commercial CAD software. The 3DM system can be used for start-to-finish design and fabrication of waveguides, 3D photonic crystals, and other complex micro-structures. These results demonstrate a technological path for implementing 3DM as a tool for micro- and nano-optical component manufacture.
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Ivan B. Divliansky, Ivan B. Divliansky, Gregory Weaver, Gregory Weaver, Michael Petrovich, Michael Petrovich, Toufic Jabbour, Toufic Jabbour, Hubert P. Seigneur, Hubert P. Seigneur, Caleb Parnell-Lampen, Caleb Parnell-Lampen, Amy Thompson, Amy Thompson, Kevin D. Belfield, Kevin D. Belfield, Stephen M. Kuebler, Stephen M. Kuebler, } "CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.601187; https://doi.org/10.1117/12.601187

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