Fabrication of optical microstructures through fractional Talbot imaging

T. J. Suleski; Y.-C. Chuang; P. C. Deguzman; R. A. Barton

doi:10.1117/12.599125

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22 January 2005 Fabrication of optical microstructures through fractional Talbot imaging

T. J. Suleski, Y.-C. Chuang, P. C. Deguzman, R. A. Barton

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Proceedings Volume 5720, Micromachining Technology for Micro-Optics and Nano-Optics III; (2005) https://doi.org/10.1117/12.599125
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Interference in the Fresnel regime of periodic structures creates a wide variety of intricate diffraction patterns. The diffraction patterns from both amplitude and phase gratings can bear a strong resemblance to the grating itself, or have much more complex structures. In this paper, we discuss a general approach for using interference patterns from amplitude gratings for lithographic fabrication of optical microstructures. We address the generation of the interference patterns from the standpoint of Talbot self-imaging. This approach enables the realization of complex optical structures with a single exposure in an appropriate fractional Talbot plane. Design approaches are discussed, and both theoretical and experimental results are presented.

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T. J. Suleski, Y.-C. Chuang, P. C. Deguzman, and R. A. Barton "Fabrication of optical microstructures through fractional Talbot imaging", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); https://doi.org/10.1117/12.599125

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