22 January 2005 Fabrication of optical microstructures through fractional Talbot imaging
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Abstract
Interference in the Fresnel regime of periodic structures creates a wide variety of intricate diffraction patterns. The diffraction patterns from both amplitude and phase gratings can bear a strong resemblance to the grating itself, or have much more complex structures. In this paper, we discuss a general approach for using interference patterns from amplitude gratings for lithographic fabrication of optical microstructures. We address the generation of the interference patterns from the standpoint of Talbot self-imaging. This approach enables the realization of complex optical structures with a single exposure in an appropriate fractional Talbot plane. Design approaches are discussed, and both theoretical and experimental results are presented.
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T. J. Suleski, T. J. Suleski, Y.-C. Chuang, Y.-C. Chuang, P. C. Deguzman, P. C. Deguzman, R. A. Barton, R. A. Barton, } "Fabrication of optical microstructures through fractional Talbot imaging", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.599125; https://doi.org/10.1117/12.599125
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