22 January 2005 Photonic systems formed by proximity field nanopatterning
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Abstract
High resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of three dimensional (3D) nanostructures that are technologically important but difficult to generate in other ways. This proposed approach can answer the greatest challenge of photonic system; a simple and reliable fabrication method of periodic and aperiodic structure. Those unique advantages of proximity field nanopatterning originated from direct conformal contact and a further application to multi-photon process, and a representative waveguiding structure are investigated. The patterning capability in a broad range of wavelengths (from UV to near-IR) and unusual structures place this method as a key technique for photonic system.
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Seokwoo Jeon, Seokwoo Jeon, Gary P. Wiederrecht, Gary P. Wiederrecht, John A. Rogers, John A. Rogers, } "Photonic systems formed by proximity field nanopatterning", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.597652; https://doi.org/10.1117/12.597652
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