22 January 2005 Micromirror array theory for imaging sensors
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Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005); doi: 10.1117/12.590327
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States
Abstract
We present a means for forming images using micromirror arrays. Using an array of 2D tilt mirrors it is possible to create an image whose resolution is much higher than the number of mirrors. We present several types of simulations, including images produced by graphical ray tracing for linear MEMS array of containing 1 and 2 mirrors, and general NxN configurations.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Andrew Hicks, Vasileios T. Nasis, Timothy P. Kurzweg, "Micromirror array theory for imaging sensors", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); doi: 10.1117/12.590327; https://doi.org/10.1117/12.590327
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KEYWORDS
Mirrors

Cameras

Micromirrors

Image resolution

Imaging arrays

Microelectromechanical systems

Sensors

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