4 April 2005 Au/Cr/IZO thin film electrode for application of thermal controllable waveguide devices
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Abstract
A Au/Cr/IZO composite thin film for application of thermal electrode of the waveguide devices is proposed. It can be fabricated easily on the glass-based waveguide devices by sputtering deposition process. The hardness and impedance properties, as well as its adhesion with the glass substrate are investigated in this study.
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Huang-Chen Guo, Huang-Chen Guo, Yung-Hsin Chen, Yung-Hsin Chen, Ying-Tsung Lu, Ying-Tsung Lu, Wann-Diing Tyan, Wann-Diing Tyan, Pong Lai, Pong Lai, Cheng-Lin Yang, Cheng-Lin Yang, } "Au/Cr/IZO thin film electrode for application of thermal controllable waveguide devices", Proc. SPIE 5723, Optical Components and Materials II, (4 April 2005); doi: 10.1117/12.590246; https://doi.org/10.1117/12.590246
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